专利名称：Method for producing a microelectronic
device
发明人：Emmanuel Augendre,Thierry Baron申请号：US14753662申请日：20150629公开号：US09917153B2公开日：20180313
专利附图：
摘要：A crystalline layer is produced from a crystalline substrate made from a firstmaterial on which a masking layer has previously been deposited; the masking layercontaining at least one trench forming an access to the substrate, by:
申请人：Commissariat A L'Energie Atomique et aux Energies Alternatives
地址：Paris FR
国籍：FR
代理机构：Oblon, McClelland, Maier & Neustadt, L.L.P.
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