专利名称：VALVE ASSEMBLY HAVING IMPROVED
CONDUCTANCE CONTROL
发明人：LUCAS, Paul, D.,CARBONE, Anthony, J.申请号：EP04780684.9申请日：20040810公开号：EP1668278A2公开日：20060614
摘要：A valve assembly including a housing having a flow channel and an annularsurface surrounding the flow channel, a slide plate movable to a closed position, and aseal ring positioned between the annular surface and the slide plate. The seal ringincludes a first and second sides, a first surface extending between the first and thesecond sides and facing towards the annular surface of the housing, and a second surfaceaxially spaced from the first surface and extending between the first and the secondsides and facing towards the slide plate. The second surface includes a continuousannular sealing portion for contacting the slide plate when the seal ring is biased againstthe slide plate so that a fluid-tight seal can be formed between the continuous annularsealing portion and the slide plate, and at least one passageway positioned between theannular sealing portion and the second side.
申请人：MKS INSTRUMENTS, INC.
地址：90 Industrial Way Wilmington, Massachusetts 01887 US
国籍：US
代理机构：Hill, Justin John
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