专利名称：Optical waveguide microcantilever with
differential output and associated methodsof cantilever sensing
发明人：Gregory Nordin,Jaime Cardenas Gonzalez申请号：US10793983申请日：20040305
公开号：US20050195407A1公开日：20050908
专利附图：
摘要：A microcantilever sensing system includes a waveguide cantilever that permitsan optical signal to propagate through an endface of the cantilever. The propagated
signal is received by a receiver waveguide across a gap from the cantilever. The receiverwaveguide provides the optical signal to a differential beamsplitter. The signal isdifferentially split according to the position of the optical signal incident upon thereceiving waveguide. A method of determining a deflection waveguide microcantilever isalso disclosed. An optical signal is transmitted from the endface of a waveguide
microcantilever and received by the receiver waveguide. The optical signal is differentiallysplit and then each split signal is compared to determine beam deflection. A method offabricating a microcantilever sensor provides a differential beamsplitter in opticalcommunication with a waveguide cantilever.
申请人：Gregory Nordin,Jaime Cardenas Gonzalez
地址：Huntsville AL US,Huntsville AL US
国籍：US,US
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